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Description
The MeV ion implantation leads to the formation of surface ripple nano-patterns on diverse kind of materials, as metals, dielectrics, and semiconductors. Also, under oblique irradiation, the implanted ions are preferentially deposit on the crests of such patterns. Based on the previous experimental facts, this work shows the formation of gold nanoparticles arranged on surface nanopatterns induced on SiO2 by 1.8 MeV Au ion implantation and at impinging angle of 60°. To promote the nanoparticle nucleation the samples were followed by a thermal annealing at 1000°C. During implantation, the ionic current was kept constant (400 nA) while the ionic fluence (proportional to implantation time) was between 0.4-2.0×10^17 cm-2. The surface morphology of the implanted substrates was analyzed by atomic force microscopy (AFM) and scanning electron microscopy (SEM). For the lowest fluences (0.4-0.8×10^17 cm-2), the formation of isolated surface structures on a flat background was observed whose morphology mimics the exoskeleton of a bug. According to a SEM-EDS analysis, the formation of gold nanoparticles on the exoskeleton of the bugs was observed. In the intermediate fluences (0.8-1.4×10^17 cm-2), a ripple background now appears and begins to surround the bugs. Finally, in the highest fluences (1.4-2.0×10^17 cm-2), the surface shows a ripple pattern without traces of the bugs. In this last case, the gold nanoparticles are formed along the crests of the surface ripples. The optical absorption of the samples show the presence of a Surface Plasmon Resonance (SPR) in the 511-555 nm wavelength region, suggesting the presence of plasmonic gold nanoparticles. The results obtained here may be of special interest for the manufacture of SERS-type sensors based on plasmonic metal nanoparticles organized according to a surface periodic nanopattern.
Reference
C F Cruz-Garcia et al 2023 Phys. Scr. 98 105956
This work was supported by
This work was financially supported by Dirección General de Asuntos del Personal Académico (DGAPA) from Universidad Nacional Autónoma de México under Programa de Apoyo a Proyectos de Investigación e Innovación Tecnológica (PAPIIT) grant IN114120.
| Keywords | ion implantation, surface ripple nanopatterns, plasmonic gold nanoparticles |
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